Independent Control of Emission Wavelength and Output Power of a Semiconductor Laser

ABSTRACT

Methods for driving a tunable laser with integrated tuning elements are disclosed. The methods can include modulating the tuning current and laser injection current such that the laser emission wavelength and output power are independently controllable. In some examples, the tuning current and laser injection current are modulated simultaneously and a wider tuning range can result. In some examples, one or both of these currents is sinusoidally modulated. In some examples, a constant output power can be achieved while tuning the emission wavelength. In some examples, the output power and tuning can follow a linear relationship. In some examples, injection current and tuning element drive waveforms necessary to achieve targeted output power and tuning waveforms can be achieved through optimization based on goodness of fit values between the targeted and actual output power and tuning waveforms.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.16/282,176, filed Feb. 21, 2019, which is a continuation of U.S.application Ser. No. 15/555,049, filed Aug. 31, 2017, now abandoned,which is a National Phase Patent Application under 35 U.S.C. § 371 ofInternational Application No. PCT/US2016/021075, filed Mar. 4, 2016,which claims the benefit of U.S. Provisional Patent Application62/129,607, filed Mar. 6, 2015, the contents of which are incorporatedherein by reference as if fully disclosed herein.

FIELD

This relates generally to methods for driving a semiconductor laser, andmore particularly to independently controlling emission wavelength andoutput power of the laser.

BACKGROUND

Semiconductor lasers are necessary for many applications, such as tracegas detection, environmental monitoring, biomedical diagnostics,telecommunications, and industrial process controls. These applicationscan benefit from tunable lasers with extremely narrow linewidths andsingle frequency emission.

To achieve narrow linewidths and wide tuning range, external cavitylaser (ECL) systems, Distributed Bragg Reflector lasers, or DistributedFeedback lasers with integrated tuning elements can be employed.However, the performance of these systems and lasers can be limited byunwanted mechanical moving parts, slow response times, narrow tuningranges, and nonlinear distortions in the laser output.

SUMMARY

This relates to methods for driving a tunable semiconductor laser withintegrated tuning elements. The methods can include modulating thetuning current and laser injection current such that the laser emissionwavelength and output power are independently controllable. In someexamples, the tuning current and laser injection current are modulatedsimultaneously. In some examples, one of these currents or both issinusoidally modulated. In some examples, a constant output power can beachieved while tuning the emission wavelength. In some examples, alarger tuning range can be achieved by examples of the disclosurecompared to lasers whose tuning current and injection current are notmodulated simultaneously. In some examples, the output power and tuningcan follow a linear relationship. In some examples, injection currentand tuning element drive waveforms necessary to achieve targeted outputpower and tuning waveforms can be achieved through optimization based ongoodness of fit between the targeted and actual output power and tuningwaveforms.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 illustrates an exemplary system in which examples of thedisclosure can be implemented.

FIG. 2A illustrates a drawing of an external cavity laser systemaccording to examples of the disclosure.

FIG. 2B illustrates a longitudinal view of an exemplary DistributedBragg Reflector laser according to examples of the disclosure.

FIG. 2C illustrates a longitudinal view of an exemplary DistributedFeedback Laser according to examples of the disclosure.

FIG. 3 illustrates a cross-sectional view of a laser according toexamples of the disclosure.

FIG. 4A illustrates an exemplary laser with an integrated tuning elementaccording to examples of the disclosure.

FIG. 4B illustrates exemplary heat-related time delays for a laser withan integrated tuning element according to examples of the disclosure.

FIG. 4C illustrates an exemplary plot of the optical output power inresponse to a square wave driven on the tuning element electrode, withasymmetry in rise and fall times due to the differences in heat-relatedtime delays according to examples of the disclosure.

FIG. 5A illustrates an exemplary relationship between laser injectioncurrent and laser output power according to examples of the disclosure.

FIG. 5B illustrates an exemplary relationship between laser drive powerand emission wavelength or wavenumber according to examples of thedisclosure.

FIG. 5C illustrates an exemplary relationship between injection currentand laser voltage according to examples of the disclosure.

FIG. 5D illustrates an exemplary relationship between the temperature ofthe active region and the thermal rollover power according to examplesof the disclosure.

FIG. 5E illustrates an exemplary relationship between tuning elementpower and laser output power according to examples of the disclosure.

FIG. 5F illustrates an exemplary relationship between tuning elementpower and emission wavelength or wavenumber according to examples of thedisclosure.

FIG. 5G illustrates an exemplary relationship between tuning elementdrive current and tuning element voltage according to examples of thedisclosure.

FIG. 6 illustrates an exemplary setup for simultaneous modulation anddynamic adjustment of the emission wavelength and output power from alaser according to examples of the disclosure.

FIG. 7A illustrates an exemplary sinusoidally modulated drive waveformapplied to the tuning element and a constant drive waveform applied tothe waveguide of a laser according to examples of the disclosure.

FIG. 7B illustrates exemplary sinusoidally modulated drive waveformsapplied to the electrodes of a laser according to examples of thedisclosure.

FIG. 7C illustrates exemplary sinusoidally varying wavelength shift andconstant output power below a thermal rollover power from a laseraccording to examples of the disclosure.

FIG. 7D illustrates exemplary sinusoidally varying wavelength shift andoutput power at or near a thermal rollover power from a laser accordingto examples of the disclosure.

FIG. 7E illustrates exemplary sinusoidally varying wavelength shift andconstant output power equal to a system requirement value according toexamples of the disclosure.

FIG. 7F illustrates exemplary non-sinusoidally modulated drive waveformsapplied to the electrodes of the laser according to examples of thedisclosure.

FIG. 7G illustrates an exemplary linear ramp of the emission wavelengthwith a constant output power below a thermal rollover power from a laseraccording to examples of the disclosure.

FIG. 7H illustrates an exemplary linear ramp of the emission wavelengthand an output power at or near the thermal rollover power according tothe examples of the disclosure.

FIG. 71 illustrates exemplary variable wavelength shift and variableoutput power from a laser according to examples of the disclosure.

FIGS. 8A-8B illustrate exemplary process flows for optimizing theinjection current and tuning element current according to examples ofthe disclosure.

DETAILED DESCRIPTION

In the following description of examples, reference is made to theaccompanying drawings in which it is shown by way of illustrationspecific examples that can be practiced. It is to be understood thatother examples can be used and structural changes can be made withoutdeparting from the scope of the various examples.

Various techniques and process flow steps will be described in detailwith reference to examples as illustrated in the accompanying drawings.In the following description, numerous specific details are set forth inorder to provide a thorough understanding of one or more aspects and/orfeatures described or referenced herein. It will be apparent, however,to one skilled in the art, that one or more aspects and/or featuresdescribed or referenced herein may be practiced without some or all ofthese specific details. In other instances, well-known process stepsand/or structures have not been described in detail in order to notobscure some of the aspects and/or features described or referencedherein.

Further, although process steps or method steps can be described in asequential order, such processes and methods can be configured to workin any suitable order. In other words, any sequence or order of stepsthat can be described in the disclosure does not, in and of itself,indicate a requirement that the steps be performed in that order.Further, some steps may be performed simultaneously despite beingdescribed or implied as occurring non-simultaneously (e.g., because onestep is described after the other step). Moreover, the illustration of aprocess by its depiction in a drawing does not imply that theillustrated process is exclusive of other variations and modificationthereto, does not imply that the illustrated process or any of its stepsare necessary to one or more of the examples, and does not imply thatthe illustrated process is preferred.

This disclosure relates to methods for driving a tunable laser withintegrated tuning elements. The tuning current and laser injectioncurrent can be modulated such that the laser emission wavelength andoutput power are independently controllable. With independentlycontrollable emission wavelength and output power, a wider tuning range(compared to a laser whose tuning current and injection current are notmodulated simultaneously) can be achieved, and the laser can emit asubstantially constant output power while the emission wavelength istuned. Moreover, unwanted mechanical moving parts and compromise in theperformance of the laser, such as slow response times and nonlineardistortions, can be avoided or reduced.

Representative applications of methods and apparatus according to thepresent disclosure are described in this section. These examples arebeing provided solely to add context and aid in the understanding of thedescribed examples. It will thus be apparent to one skilled in the artthat the described examples may be practiced without some or all of thespecific details. Other applications are possible, such that thefollowing examples should not be taken as limiting.

FIG. 1 illustrates an exemplary system in which examples of thedisclosure can be implemented. Trace gas detection system 110 caninclude a display 112, laser 114, and detector 116. Laser 114 can beconfigurably operable using any of the methods and waveforms as will bedisclosed.

Tunable semiconductor lasers are needed for many applications, such astrace gas detection, environmental monitoring, biomedical diagnostics,telecommunications, and industrial process controls. These applications,in particular, can benefit from tunable lasers with narrow or extremelynarrow linewidths and single frequency emission.

Although typically used in large, bulky systems, tunable semiconductorlasers can have many uses in portable electronic devices. For example,wall-mountable trace gas detection system 110 can be located in a user'sgarage and can be used to detect if the exhaust from an automobileparked in the garage exceeds a safe level. The wall-mountable trace gasdetection system 110 can provide a warning on display 112 andadditionally transmit the information to a mobile telephone. Inresponse, the mobile telephone can warn the user of the hazard and canprevent the user from entering the garage.

One way to achieve a wide tuning range is by using an external cavitylaser (ECL) system. FIG. 2A illustrates a drawing of an external cavitylaser system according to examples of the disclosure. The ECL system 208can include a gain medium 200, lens 202, and diffraction grating 204.The emission wavelength of the ECL system 208 can be tuned by rotatingthe diffraction grating 204. Although the ECL system 208 can achieve awide tuning range, the system can include macroscopic mechanical movingparts and thus can have limited tuning speed, can require precisionalignment, can be susceptible to mechanical vibrations, and can have atendency to exhibit mode hops. The external cavity laser architecturecan be impractical for many of the applications discussed earlier,especially when used in portable electronic devices.

Another way to achieve a wide tuning range and narrow linewidths is byincorporating a periodic structure into the semiconductor laser. Twotypes of lasers with an incorporated period structure are DistributedBragg Reflector (DBR) and Distributed Feedback (DFB) lasers.

FIG. 2B illustrates a longitudinal view of an exemplary DBR laseraccording to examples of the disclosure. DBR laser 210 can comprise oneor more diffraction gratings located in a grating section 212 that canbe separate from the gain section 214. In some examples, DBR laser 210can include grating sections, such as grating section 212, located atboth ends of the device (not shown). The diffraction grating can belocated on or above the active region 216 and can be employed to provideoptical feedback to reflect light back into the cavity to form aresonator. The grating can be configured to reflect only narrow bands ofwavelengths to produce a single longitudinal mode wavelength, and theperiod of the grating can be adjusted to achieve specific laser emissionwavelengths.

FIG. 2C illustrates a longitudinal view of an exemplary DFB laseraccording to examples of the disclosure. DFB laser 220 can comprise adiffraction grating located in grating section 222, which can beintegrated into or located on the active region 226. The structure andfunctionality of the diffraction grating of a DFB laser can be similarto that of a DBR laser. However, unlike DBR lasers where the gratingsection 212 is separate from the gain section 214, the DFB laser canhave a gain section that coincides with the grating section. Since thegain section of the DFB laser can be located in the same region as thegrating section 222, DFB lasers can have shorter cavity lengths.Additionally, DFB lasers can be less susceptible to mode hops.

FIG. 3 illustrates a cross-sectional view of a laser according toexamples of the disclosure. Laser 300 can comprise a substrate 310,cladding layers 312, insulating cladding 318, active region 314, andelectrodes 316. Laser 300 can be mounted to or touching submount 320.Laser 300 can be driven by a source 324 that supplies an injectioncurrent I_(L), for example. To tune the emission wavelength of laser300, the temperature of the active region 314 or the injection currentI_(L) can be adjusted. In some examples, the temperature can be adjustedto coarsely tune the emission wavelength, and the injection currentI_(L) can be adjusted for more precise tuning.

To adjust the temperature of the active region 314, a thermo-electriccooler (TEC) 322 can apply heat to submount 320. The heat can passthrough the electrode 316, substrate 310, and cladding layer 312 toactive region 314, which can cause a change in the refractive index ofthe grating (located on or above active region 314). The change inrefractive index can lead to a change in the emission wavelength.Therefore, the emission wavelength of laser 300 can be tuned by changingthe heat applied through TEC 322. However, there can be a few problemswith tuning through applied heat. Heating the laser may require a lot ofpower from TEC 322. Requiring a lot of power may not be practical forcertain devices, such as portable electronic devices, which havestringent power constraints due to portability and size requirements.Additionally, heating the laser 300 using TEC 322 can lead to a slowresponse resulting in slow tuning speeds, as TEC 322 may need to cooland heat the laser 300, submount 320, and heat sink (not shown).Accordingly, the time delay between applying the heat and achieving thetargeted emission wavelength can be on the order of seconds, and manyapplications may need quicker adjustment of the laser emissionwavelength.

Another method of tuning laser 300 can be through the injection currentI_(L). Injection current I_(L) can be used to drive the laser throughelectrodes 316. Similar to using heater 322, the injection current I_(L)can heat up the active region 314 resulting in a change in the emissionwavelength. While tuning using the injection current may provide a fineradjustment in wavelength, the tuning range can be limited when usingthis method because the laser efficiency may decrease at the highinjection currents necessary to substantially increase the temperature.For example, the tuning range can be on the order of about 0.2% from thenominal wavelength. For a 9 μm laser, this can lead to a tuning range ofonly 0.036 1_1111, which may be insufficient for applications such asspectroscopy. Furthermore, independent control of the laser output powerand the emission wavelength may not be possible, since both the outputpower and emission wavelength can be influenced by the injectioncurrent.

One way to overcome the problems encountered when tuning through a TECor through the injection current can be to use integrated tuningelements. FIG. 4A illustrates an exemplary laser with an integratedtuning element according to examples of the disclosure. Laser 450 cancomprise a substrate 460, cladding layers 462, insulated cladding 463,active region 464, electrodes 456, 466, and 468, and resistive cladding461. Laser 450 can comprise two separate structures 480 and 482.Structure 480 can be a tuning element, and structure 482 can be a laserstructure, for example. A source 474 can be connected to the top andbottom electrodes 456 and 468 of the laser structure 482 to provide aninjection current I_(L) to drive the laser 450. Tuning element orstructure 480 can be an electrically contacted structure that is inclose proximity to structure 482. Source 476 can be connected to the topelectrode 466 to provide tuning current I_(T) to drive the tuningelement or structure 480. In one embodiment, trench 478 forms anelectrical resistor that generates heat when current is provided bysource 476. While FIG. 4A shows sources 474 and 476 as current sources,one skilled in the art would understand that any type of source can beconnected. Examples of the disclosure can include, but are not limitedto, source 476 altering the modal refractive index of the laserwaveguide through heating, plasma dispersion effects, electro-opticeffects, or a combination.

Source 474 can drive the laser through injection current I_(L) toachieve a targeted output power, and source 476 can adjust thetemperature of the active region 464 through tuning current I_(T) toachieve a targeted emission wavelength. However, adjusting the injectioncurrent I_(L) can affect the temperature of the active region 464, andadjusting the tuning current I_(L) can affect the gain of the laser 450.Since the injection current I_(L) and the tuning current I_(T) are notentirely decoupled, adjusting the injection current I_(L) and adjustingthe tuning current I_(T) can have limited flexibility in optimizing theemission wavelength without negatively affecting the optical losses orelectrical properties of the laser.

The laser can also include multiple heat-related time delays, as shownin FIG. 4B. Path 490 and 496 can be associated with heat induced by thetuning element current or source 476. Paths 492 and 494 can beassociated with heating or cooling induced by TEC 422. Heat along path490 can diffuse from the tuning element to the active region 464 in thelaser structure, leading to a time delay that can be on the order ofhundreds of μs. Heat along path 496 can diffuse through insulatingcladding 463, substrate 460, and electrode 468 to TEC 422. Heat alongpath 494 can diffuse from the submount (not shown) and substrate 460 tothe active region 464 to heat the laser ridge, and heat along path 492can diffuse from the laser ridge to the substrate 460 and submount tocool the laser ridge. The time delays from paths 492 and 494 can beabout 1-100 ms. Due to the large difference between the time delays ofpath 490 and path 492/494, the use of source 476 and 474 along with TEC422 can lead to nonlinear distortions and long response times. FIG. 4Cillustrates an exemplary plot of the output power response to a squarewave modulation of the tuning element source 476 due to the differencesin heat-related time delays according to examples of the disclosure.

FIGS. 5A-5C illustrate exemplary effects of altering the injectioncurrent applied to the laser according to examples of the disclosure.FIG. 5A illustrates an exemplary relationship between laser injectioncurrent and laser output power according to examples of the disclosure.For a constant submount temperature, the laser output power can belinearly dependent on the injection current above the laser thresholdcurrent. The slope efficiency of the laser can be determined based onthis linear dependency. At high injection currents, this lineardependence can break down due to an increase in the temperature of theactive region causing a decrease in internal quantum efficiency, whichin turn can cause the output power to saturate (i.e., thermal rollover).

FIG. 5B illustrates an exemplary relationship between laser drive powerand emission wavelength or wavenumber according to examples of thedisclosure. For a constant submount temperature, the emission wavelengthor wavenumber can be linearly dependent on the laser drive power. Asshown, the emission wavelength can redshift with increased drive power.As discussed above, a change in temperature of the active region canlead to a change in the refractive index, and therefore a change in theemission wavelength.

FIG. 5C illustrates an exemplary relationship between injection currentand laser voltage according to examples of the disclosure. The shift inemission wavelength that results from thermal tuning can be proportionalto the power dissipation inside the laser, which can be related to theproduct of the voltage and current. Due to the relationship betweeninjection current and laser voltage illustrated in the figure, theemission wavelength may not be directly proportional to the injectioncurrent.

FIG. 5D illustrates an exemplary relationship between the temperature ofthe active region and the thermal rollover power according to examplesof the disclosure. As discussed above, while increasing the injectioncurrent can lead to a higher output power, the temperature of the activeregion can increase. Above a certain injection current, the temperatureof the active region can be so high that a reduction in the efficiencyof the laser and a deviation from the linear dependency (or slope of theplot illustrated in FIG. 5A) can result. The output power can saturateto a maximum output power (i.e., thermal rollover power or where thederivative of power to injection current is zero) within the safeoperating range of the laser. The maximum output power or thermalrollover power can depend on many factors including, but not limited to,the heatsink or substrate temperature, the tuning or heater current,device length, and device design. The thermal rollover power candecrease as the temperature of the active region increases, as shown inthe figure. As a result, the thermal rollover power can vary for thesame laser device depending on operating conditions.

FIGS. 5E-5G illustrate exemplary effects of altering the tuning elementof the laser according to examples of the disclosure. FIG. 5Eillustrates an exemplary relationship between tuning element power andlaser output power according to examples of the disclosure. For aconstant laser injection current, the laser output power can be linearlydependent on the tuning element power. As shown in the figure, the laseroutput power can decrease as tuning power is increased.

FIG. 5F illustrates an exemplary relationship between tuning elementpower and emission wavelength or wavenumber according to examples of thedisclosure. For constant laser injection current, the emissionwavelength can be nearly linear dependent on the tuning element drivepower. As shown in the figure, the laser output power can decrease astuning element drive power increases.

FIG. 5G illustrates an exemplary relationship between tuning elementdrive current and tuning element voltage according to examples of thedisclosure. The IV curve of the tuning element may become nonlinear athigh tuning element currents. This nonlinear relationship can cause thelaser output power and emission wavelength to diverge from having aknown relationship (e.g., quadratic dependence) with respect to thetuning element current. Due to divergence from a known relationship andbecause of the coupling between the injection current and tuning elementcurrent with emission wavelength and output power, simultaneousoptimization of the emission wavelength and output power can become achallenge. Additionally, the performance of the laser (e.g., tuningrange and output power) can be limited.

FIG. 6 illustrates a setup for simultaneous modulation and dynamicadjustment of the emission wavelength and output power of a laseraccording to examples of the disclosure. The setup can include a laser600. Laser 600 can include, but is not limited to, a DFB or DBRsemiconductor laser, such as a quantum cascade laser (QCL), interbandcascade laser (ICL), or type-I laser. In some examples, the laser canoperate in several wavelength ranges including the near- andmid-infrared. Laser 600 can include two separate electrodes 664 and 666.One electrode, such as electrode 664, can be coupled to the tuningelement (such as structure 480 illustrated in FIG. 4A). The otherelectrode, such as electrode 666, can be coupled to the laser structure(such as structure 482 illustrated in FIG. 4A).

Two sources can be coupled to the electrodes to independently drive theelectrodes. For example, source 676 can be coupled to electrode 666 ofthe tuning element, and source 674 can be coupled to electrode 664 ofthe laser. The output 672 of laser 600 can be directed at lens 630,which can reflect off mirror 632. Beamsplitter 634 can split the opticalbeam into two different paths 640 and 642. Path 640 can be directed atdetector 644. Path 642 can be directed at mirror 636, which can reflectthe light to detector 646. Detector 644 can measure the laser outputpower, and detector 646 can measure emission wavelength. In someexamples, an etalon can be included in path 642 between mirror 636 anddetector 646. In some examples, an optical spectrometer can be used tomeasure emission wavelength. The detected signals from detectors 644 and646 can be input to a computer or controller 650.

The controller 650 can monitor deviations between the detected signalsand the targeted signals or response waveform. Based on the deviations,the controller 650 can generate drive waveforms 613 and 615. Drivewaveforms 613 and 615 can be new waveforms or adjusted waveforms used tominimize or reduce the deviations. Digital-to-analog converters (DACs)652 and 654 can be coupled to controller 650 and sources 674 and 676 toconvert the signals or waveforms generated by controller 650 fromdigital to analog signals.

FIGS. 7A-7B and 7F illustrate exemplary drive waveforms applied to theelectrodes of a laser according to examples of the disclosure. FIGS.7C-7E, 7G-7I illustrate exemplary output waveforms of the laseraccording to examples of the disclosure. As shown in FIG. 7A, the tuningcurrent 702 can be sinusoidally modulated, while the laser injectioncurrent 704 can be constant. In some examples, both the tuning current702 and laser injection current 704 can be sinusoidally modulated (asshown in FIG. 7B). In some examples, the laser injection current 704 canbe proportional to the square root of the sine of the modulating tuningcurrent 702.

Exemplary resulting output waveforms are shown in FIG. 7C, where thewavelength shift 706 of the laser can vary sinusoidally. Additionally,the laser can emit a constant or substantially constant output power708. This example shows that a substantially constant output power canbe achieved while tuning the wavelength. With the injection currentgreater than the threshold current, the output power can be less thanthe thermal rollover power for a given tuning range or range ofwavelength shift. As a result, the output power can be varied (increasedor decreased) to achieve a desired tuning range. Achieving a constantoutput power while tuning the wavelength can be useful for applicationssuch as wavelength modulation spectroscopy.

FIG. 7D illustrates exemplary waveforms where the laser can be operatedsuch that the output power is close to the thermal rollover poweraccording to examples of the disclosure. The laser can be operated withan output power where the output power to current slope begins todeviate from a linear relationship (i.e., close to the thermal rolloverpower). In some examples, the laser can be operated such that the outputpower is substantially equal to the thermal rollover power, leading to adecreased tuning range compared to when the output power 708 issubstantially less than the thermal rollover power 710. In someexamples, the laser can be operated with an output power betweendeviation from the linear relationship and the thermal rollover power(i.e., power where the derivative of the output power to current iszero). Examples of the disclosure include adjusting the operatingconditions of the laser such that derivative of the output power tocurrent is zero given the active region temperature. Operating the lasersuch that the output power 708 is substantially equal or close to thethermal rollover power 710 can be useful for applications such aswavelength modulation spectroscopy measurements that are normalized to areference detector.

In some examples, a larger tuning range can be achieved by decreasingthe output power. In some examples, the laser can be operated such thatthe output power is can be based on the requirements needed for thesystem or application in which the laser is employed. As illustrated inFIG. 7E, by operating the laser with conditions such that the systemoptical power requirement 711 is met but the requirements are notsubstantially exceeded, a larger tuning range or wavelength shift can beachieved compared to the tuning range when operating the laser abovesystem requirements. For example, trace gas detection system (discussedabove and illustrated in FIG. 1) located in a user's garage can beconfigured such that a detected carbon monoxide level less than 400 ppmis within a safe level. The system requirement can be defined by theoperating conditions which 400 ppm of carbon monoxide is detected. Thelaser associated with the trace gas detection system (such as laser 114illustrated in FIG. 1) can then operate at a value such that the systemrequirement is met, 400 ppm of carbon monoxide is detected, and a widertuning range is achieved (than operating the laser such that the systemrequirements are exceeded). In some examples, the value can be equal tosystem operation at 1-10% above system requirements.

In some examples, the amount of phase that differs between tuningcurrent 702, laser injection current 704, and wavelength shift 706 candepend on the frequency of modulation. In some examples, the phasedifference between the laser injection current 704 and the wavelengthshift 706 can be 0° or 180°. Although the disclosure includes thermalheating as a tuning mechanism, examples of the disclosure can include,and are not limited to, other tuning mechanisms such as carrierconcentration modulation.

FIG. 7F illustrates exemplary non-sinusoidally modulated drive waveformsapplied to the electrodes of the laser according to examples of thedisclosure. As shown in the figure, the tuning current 712 can bemodulated, but unlike the tuning current 702 of FIG. 7A, tuning current712 can be non-sinusoidal in order to correct for nonlinearities andthermal time constants, such as the nonlinearities and thermal timeconstants discussed above. Additionally, laser injection current 714 canbe non-sinusoidal. The results can be a sinusoidally varying outputwavelength and an output power that is constant.

FIG. 7G illustrates an exemplary linear ramp of the emission wavelengthwith a constant output power below a thermal rollover power from a laseraccording to examples of the disclosure. This example also shows thatthe emission wavelength can be tuned without affecting the output powerof the laser. Linearly tuning the laser while achieving a constantoutput power that is less than the thermal rollover power 730 can beuseful for applications such as direct absorption spectroscopy.

In some examples, the laser can be operated such that the output powerwaveform has the same shape as the thermal rollover power, asillustrated in FIG. 7H. FIG. 7H illustrates an exemplary linear ramp ofthe emission wavelength with an output power close to the thermalrollover power according to the examples of the disclosure. The lasercan be operated at conditions such that the output power 728 issubstantially equal to the thermal rollover power 730 while linearlychanging the wavelength shift 726. Such a linear change in emissionwavelength can be useful for applications such as direct absorptionspectroscopy with normalization to a reference detector.

FIG. 71 illustrates exemplary variable wavelength shift and variableoutput power over time from a laser according to examples of thedisclosure. As shown in the figure, both output power 748 and wavelengthshift 746 can vary sinusoidally. In some examples, output power 748 andwavelength shift 746 can both vary at non-harmonically relatedfrequencies. Simultaneous sinusoidal modulation of both output power andemission wavelength can be useful for applications such as wavelengthmodulation spectroscopy.

One skilled in the art would understand that the exemplary figuresdescribed above can represent targeted waveforms. In some examples, theresulting output waveforms can differ from the targeted waveforms due tononlinearities (not shown).

FIGS. 8A-8B illustrate exemplary process flows for optimizing theinjection current and tuning element current according to examples ofthe disclosure. Process 800 can begin with dividing a time interval intoa series of sample points (step 802). In some examples, process 800 canbe performed by a processor or controller (such as controller 650 ofFIG. 6). In some examples, the time interval can be based on arepetition period of the desired power and wavelength responsewaveforms. The controller can determine the target output power andemission wavelength at each sample point (step 804) and from this, cancalculate the expected photodiode signals (step 806). The expectedphotodiode signals can be based on factors such as the response curvesof the photodiode, the length of the etalon, the optical properties ofthe etalon, the response of the spectrometer, or any combination.

The controller can set the tuning element current and laser drivecurrent to initial values (step 808). In some examples, the tuningelement can be set to zero, and the laser drive current can be set to aconstant value above threshold (i.e., value that the laser is turnedon). Alternatively, the laser can be driven using pre-determinedwaveforms. In some examples, the pre-determined waveforms can be basedon previous characterization data from the laser. The pre-determinedwaveforms can include, but are not limited to, light IV curves fordifferent injection currents and tuning element currents and stepresponses of injection current perturbations. The controller or a signalacquisition system can detect the output signals and digitize over thetime interval (step 810). In some examples, the time interval can be onetime interval. In some examples, the output signals can be signalsmeasured from the detectors, such as detectors 644 and 646 of FIG. 6.

From the output signals or waveforms, the goodness of fit can becalculated (step 812). The goodness of fit (GOF) can be a figure ofmerit to quantify the difference between the targeted and measured laseroutputs or waveforms, including the output powers and emissionwavelengths. For example, the GOF can be defined as:

GOF=Ef _(i=1) w ₁ x(W(t)−W _(T)(t))² +w ₂ x(P(t)−PT(t))²  (1)

where W(t) is the measured wavelength at time t, W_(T)(t) is thetargeted wavelength at time t, P(t) is the measured output power at timet, P_(T)(t) is the targeted output power at time t, w_(i) and w₂ areweighted values, and P is the number of sample points in the timeinterval.

The controller can optimize the drive injection current or tuningelement current or both (step 814). Process 850 of FIG. 8B illustratesan exemplary flow diagram of optimizing the drive injection current ortuning element current. The controller can begin with the first samplepoint in the time interval (step 852). The controller can change thelaser injection current or tuning element current or both in a firstdirection (step 854), and then detect the output waveform (step 856) andcalculate the first GOF (step 856) from the change in the firstdirection. The controller can also change the laser injection current ortuning element current or both in a second direction (step 860), andthen detect the output waveform (step 862) and calculate the second GOF(step 864) from the change in the second direction. In some examples,the first direction can be opposite the second direction. For example,the first direction can be one step size higher in value and the seconddirection can be one step size lower in value than the injection currentset in step 808 of FIG. 8A. In step 868, the first GOF and second GOFcan be compared. Based on which GOF has the lowest value (compared tothe other GOF) or deviation from a pre-determined or targeted GOF, thedrive waveforms can be adjusted.

The controller can determine if all of the sample points have beentested (step 870). If not, the controller can move to the next samplepoint (step 872) and repeat the adjustment process for that next samplepoint. If all sample points have been tested, the drive waveforms can bestored in memory (step 874).

In some examples, processes 800 and 850 can be repeated until a certainGOF value is achieved. In some examples, processes 800 and 850 can runcontinuously or at incremental periods while the laser is operating toactively correct for any drift in the source properties over time.

One or more of the functions described above can be performed, forexample, by firmware stored in memory and executed by a processor orcontroller (such as controller 650 of FIG. 6). The firmware can also bestored and/or transported within any non-transitory computer-readablestorage medium for use by or in connection with an instruction executionsystem, apparatus, or device, such as a computer-based system,processor-containing system, or other system that can fetch theinstructions from the instruction execution system, apparatus, or deviceand execute the instructions. In the context of this document, a“non-transitory computer-readable storage medium” can be any medium(excluding a signal) that can contain or store the program for use by orin connection with the instruction execution system, apparatus, ordevice. The non-transitory computer readable storage medium can include,but is not limited to, an electronic, magnetic, optical,electromagnetic, infrared, or semiconductor system, apparatus, ordevice, a portable computer diskette (magnetic), a random access memory(RAM) (magnetic), a read-only memory (ROM) (magnetic), an erasableprogrammable read-only memory (EPROM) (magnetic), a portable opticaldisc such as a CD, CD-R, CD-RW, DVD, DVD-R, or DVD-RW, or flash memorysuch as compact flash cards, secured digital cards, USB memory devices,memory sticks and the like. In the context of this document, a“transport medium” can be any medium that can communicate, propagate, ortransport the program for use by or in connection with the instructionexecution system, apparatus, or device. The transport readable mediumcan include, but is not limited to, an electronic, magnetic, optical,electromagnetic, or infrared wired or wireless propagation medium.

In some examples, a method of driving a laser having a tuning elementand a waveguide is disclosed. The method may comprise: applying a firstwaveform to the tuning element of the laser; applying a second waveformto the waveguide of the laser; modulating the first waveformsimultaneously with modulating the second waveform, wherein an emissionwavelength and an output power of the laser are independentlycontrollable. Additionally or alternatively to one or more examplesdisclosed above, in other examples, the first waveform is different fromthe second waveform. Additionally or alternatively to one or moreexamples disclosed above, in other examples, the method furthercomprises modulating first and second waveforms at non-harmonicfrequencies. Additionally or alternatively to one or more examplesdisclosed above, in other examples, at least one of the first waveformand the second waveform is sinusoidal. Additionally or alternatively toone or more examples disclosed above, in other examples, at least one ofthe first waveform and the second waveform is non-sinusoidal.Additionally or alternatively to one or more examples disclosed above,in other examples, the method further comprises modulating the first andsecond waveforms to vary the emission wavelength sinusoidally.Additionally or alternatively to one or more examples disclosed above,in other examples, the method further comprises modulating the first andsecond waveforms to maintain the output power at a constant value.Additionally or alternatively to one or more examples disclosed above,in other examples, wherein the laser is included in a system with arequirement the method further comprises modulating the second waveformsuch that the system is operating at the requirement. Additionally oralternatively to one or more examples disclosed above, in otherexamples, the method further comprises modulating the second waveformsuch that a derivative of the output power to an injection current iszero. Additionally or alternatively to one or more examples disclosedabove, in other examples, the method further comprises modulating thefirst and second waveforms such that the output power varies at least inpart sinusoidally. Additionally or alternatively to one or more examplesdisclosed above, in other examples, the second waveform includes a 0° or180° phase shift from the emission wavelength. Additionally oralternatively to one or more examples disclosed above, in otherexamples, the method further comprises modulating the first and secondwaveforms such that the emission wavelength is constant or varieslinearly. Additionally or alternatively to one or more examplesdisclosed above, in other examples, the method further comprisesmodulating the first and second waveforms such that a derivative of theoutput power to injection current is zero. Additionally or alternativelyto one or more examples disclosed above, in other examples, the methodfurther comprises modulating the first and second waveforms such thatthe emission wavelength varies linearly and the output power isconstant. Additionally or alternatively to one or more examplesdisclosed above, in other examples, the method further comprisesmodulating the first and second waveforms such that the emissionwavelength is constant and the output power varies sinusoidally.Additionally or alternatively to one or more examples disclosed above,in other examples, the method further comprises: detecting the emissionwavelength; detecting the output power; determining a first differencebetween the detected emission wavelength and a targeted wavelength;determining a second difference between the output power and a targetedpower; and adjusting at least one of the first and second waveforms toreduce at least one of the first difference and the second difference.

In some examples, a non-transitory computer readable storage medium isdisclosed. The non-transitory computer readable storage medium may storeone or more programs, the one or more programs comprising instructions,which when executed by a device, cause the device to perform a methodcomprising: applying a first waveform to a first electrode of a laser,wherein the first electrode is coupled to a tuning element of the laser;applying a second waveform to a second electrode of the laser, whereinthe second electrode is coupled to a waveguide of the laser; andmodulating the first waveform simultaneously with modulating the secondwaveform.

In some examples, a device is disclosed. The device may comprise: alaser including a first electrode and a second electrode, wherein thefirst electrode is driven by a first waveform and the second electrodeis driven by a second waveform; and logic configured to modulate thefirst and second waveforms simultaneously, wherein at least one of anemission wavelength and an output power of the laser are based on thesimultaneous modulation of the first and second waveforms. Additionallyor alternatively to one or more examples disclosed above, in otherexamples, a tuning range of the laser is at least 0.2% of a centerwavelength of the laser. Additionally or alternatively to one or moreexamples disclosed above, in other examples, the laser is a DistributedFeedback (DFB) or a Distributed Bragg Reflector (DBR) laser.Additionally or alternatively to one or more examples disclosed above,in other examples, the laser is a quantum cascade laser (QCL), interbandcascade laser (ICL), or type-I laser. Additionally or alternatively toone or more examples disclosed above, in other examples, the firstelectrode forms a portion of a tuning element and the second electrodeforms a portion of a laser structure, the tuning element thermallycoupled to the laser structure.

Although the disclosed examples have been fully described with referenceto the accompanying drawings, it is to be noted that various changes andmodifications will become apparent to those skilled in the art. Suchchanges and modifications are to be understood as being included withinthe scope of the disclosed examples as defined by the appended claims.

1-20. (canceled)
 21. A method of driving a semiconductor laser,comprising: applying a laser injection current to the semiconductorlaser to generate a laser output power targeting a predetermined outputpower; and applying a tuning current to a tuning element to generate alaser emission wavelength targeting a predetermined laser emissionwavelength; wherein the semiconductor laser and the tuning element areconfigured to control the laser emission wavelength and the laser outputpower of the semiconductor laser independently of one another.
 22. Themethod of claim 21, further comprising: varying the laser injectioncurrent while maintaining an approximately consistent submounttemperature such that the laser output power is linearly dependent onthe laser injection current.
 23. The method of claim 22, wherein thelaser output power is linearly dependent on the laser injection currentwhen the laser injection current exceeds a laser threshold current. 24.The method of claim 23, further comprising: determining a laser slopeefficiency based at least in part on the linear dependence of the laseroutput power on the laser injection current when the laser injectioncurrent exceeds the laser threshold current.
 25. The method of claim 21,further comprising: varying the tuning current to tune the laseremission wavelength while maintaining an approximately constant laseroutput power.
 26. The method of claim 21, further comprising: varying alaser drive power while maintaining an approximately consistent submounttemperature such that the laser emission wavelength is linearlydependent on the laser drive power.
 27. The method of claim 26, whereinthe laser emission wavelength shifts to a lower laser emissionwavelength when the laser drive power increases.
 28. The method of claim21, further comprising: varying a tuning element drive power whilemaintaining an approximately consistent laser injection current suchthat the laser output power is linearly dependent on the tuning elementdrive power.
 29. The method of claim 28, wherein the laser output powerdecreases as the tuning element drive power increases.
 30. The method ofclaim 21, further comprising: varying a tuning element drive power whilemaintaining an approximately consistent laser injection current suchthat the laser emission wavelength is linearly dependent on the tuningelement drive power.
 31. The method of claim 21, further comprising:tuning the laser emission wavelength within a predetermined tuning rangewhile maintaining an approximately consistent laser output power, whenthe laser injection current exceeds a laser threshold current.
 32. Themethod of claim of claim 31, wherein the laser output power is less thana thermal rollover power for a given tuning range.
 33. The method ofclaim 21, further comprising: applying a non-sinusoidally modulatedlaser injection current while maintaining an approximately consistentlaser output power, such that the laser output wavelength varies atleast in part sinusoidally.
 34. The method of claim 21, wherein anamount of phase difference between the tuning current, the laserinjection current, and a wavelength shift depends primarily on amodulation frequency of the tuning current.
 35. An optical device,comprising: a semiconductor laser comprising: a laser structure; and atuning structure; logic configured to simultaneously apply a laserinjection current to the laser structure and a tuning current to thetuning structure to control at least one of a laser emission wavelengthor a laser output power independently of one another.
 36. The opticaldevice of claim 35, wherein the laser structure is thermally coupled tothe tuning structure.
 37. The optical device of claim 35, wherein thetuning structure is configured to generate heat to control a gain of thesemiconductor laser.
 38. The optical device of claim 35, wherein thesemiconductor laser is at least one of a Distributed Bragg Reflector(DBR) laser, a quantum cascade laser (QCL), an interband cascade laser(ICL), or a type-I laser.
 39. A method of driving a tunablesemiconductor laser with a tuning element, comprising: modulating alaser injection current to a laser to generate a laser output power anda laser emission wavelength; modulating a tuning current to the tuningelement at approximately the same time as modulating the laser injectioncurrent to produce a wider laser emission wavelength tuning range,wherein the laser output power and the laser emission wavelength areindependently controllable.
 40. The method of claim 39, furthercomprising: comparing a predetermined laser output power with a measuredlaser output power based at least in part on a goodness of fit value anda tuning element drive waveform; adjusting at least one of the laserinjection current or the tuning element drive waveform based at least inpart on the compared predetermined laser output power and an actuallaser output power to target the predetermined laser output power.